詳細推導并統一了形狀誤差和誤差運動高精度檢測2分離技術中各類傳感器的讀數方程,包括傳統的差動變壓器式位移傳感器、電渦流式位移傳感器、電容式微位移傳感器和近年來出現的激光微位移傳感器、激光角位移傳感器以及后兩者組合成的組合式廣義位移傳感器。以統一的列表方式闡明了各傳感器的讀數貢獻。其優點是:根據選用的誤差分離方法和與之適配的傳感器,便可按列表方式快速、方便地排出用于直線、圓、圓柱度和平面度等誤差分離的原始讀數方程,并對誤差分離的可行性作出了初步分析。
關鍵詞: 激光位移傳感器; 形狀誤差; 誤差運動; 誤差分離技術
Abstract : In the process of high2precision measurement and separation of form error and error motions , the readings are different with the variance of sensor types. Reading equations of different sorts of sensors are derived elaborately and united to2 gether , including not only ordinary inductance2type displacement sensor , electric2eddy2type displacement sensor , capacitance2 type micro displacement sensor , but also up2to2date laser micro displacement sensor , laser angular displacement sensor and com2 bined2type generalized displacement sensor consisting of the above two. Moreover , the reading contributions of these sensors are
expounded by means of uniform listing. This will bring about obvious merits , that is , according to the selected error separation methods and corresponding sensors , original reading equations for different methods such as straightness , roundness , cylindricity and flatness error separations can be obtained conveniently and rapidly on the basis of these lists , so the feasibility of error sepa2 rations can be analyzed primarily.
Key words : laser displacement sensors ; form error ; error motion ; error separation techniques ( EST)